TAIYO NIPPON SANSO Technical Report

Review

History of Air Separation Unit Technologies Developed by TNSC

In 1935, we succeeded in domestically producing Japan's first air separation unit. Since then, based on our abundant experience and superior technological capabilities, we have developed various technologies including: process technology to design processes that match customer needs; pre-treatment equipment to remove moisture and carbon dioxide from raw material air; and cryogenic equipment such as rectifying columns, which are the core components of air separation units. Air separation units have a history of more than 100 years, and continue to make progress based on these technological capabilities. This paper introduces the development of air separation units that we have been working on, and describes how we intend to develop these technologies in the future.
(Full pages PDF:581KB)

Articles

Utilizing of Mixture Refrigerant in Brayton Cycle Using Turbomachinery

AFFORDABLE AND CLEAN ENERGY
INDUSTRY, INNOVATION AND INFRASTRUCTURE
INDUSTRY, INNOVATION AND INFRASTRUCTURE

TAIYO NIPPON SANSO corporation uses various refrigeration cycles in the production and application of industrial gases such as oxygen, nitrogen and argon. One of them is the Brayton cycle that uses adiabatic compression and adiabatic expansion with turbomachinery (turbo-Brayton cycle). In 2013, we commercialized a turbo-Brayton cycle refrigerator that uses neon as a refrigerant for cooling superconductivity power equipment. The refrigerant of the turbo-Brayton cycle does not liquefy at the cooling temperature, and the design of turbomachinery must be established according to the physical properties. Therefore, neon was selected for our commercialized refrigerator. Also, the pressure ratio of the turbo-Brayton cycle is chosen for high efficiency. On the other hand, depending on the pressure ratio and the temperature condition of the fluid to be cooled, the fluid to be cooled may be below the freezing point, so measures to prevent freezing are taken.
Recent studies have shown that the utilizing of mixture refrigerant provides a wider range for pressure ratio and turbomachinery design, and solves the problem of solidification of the fluid to be cooled while keeping up performance of the refrigerator. In this paper, we report the concept, advantages and the result of specific study of utilizing mixture refrigerant in the turbo-Brayton cycle.
(Full pages PDF:509KB)
NeoKelvin@-Turbo Website

Demonstration of AlGaN-based Far-UVC LED Epitaxial Growth by Using SR4000HT and Development of Technology to Improve Uniformity by Controlling Al Composition and Thickness of AlGaN

AFFORDABLE AND CLEAN ENERGY
INDUSTRY, INNOVATION AND INFRASTRUCTURE
INDUSTRY, INNOVATION AND INFRASTRUCTURE
INDUSTRY, INNOVATION AND INFRASTRUCTURE

Far-UVC light with a wavelength of 200-230 nm has been shown to inactivate viruses without adversely affecting the human body, and there are high expectations for its practical application as a virus inactivation technology that can be used in a manned environment. The SR4000HT metal organic chemical vapor deposition (MOCVD) system of Taiyo Nippon Sanso Corp. has demonstrated the luminescence of aluminum gallium nitride (AlGaN)-based deep ultraviolet light-emitting diodes (UVC LEDs) in the 280-nm band, there was a problem of not being able to demonstrate the luminescence at shorter wavelengths. In this development, we worked on the epitaxial growth technology development of AlGaN-based Far-UVC LEDs using the SR4000HT. By adjusting the supply rate of metal organic, the Al composition of the AlGaN layer that constitutes the LED structure could be linearly controlled. Using this Al composition control technique, a UVC LED emitting at a wavelength of 226 nm was successfully fabricated. The peak emission wavelength was distributed between 227.8 and 229.1 nm in the wafer diameter direction, and a wavelength uniformity of Max-Min=1.3 nm was obtained. The control of the in-plane Al composition distribution and film thickness distribution in the AlGaN layer was confirmed to be easy. These results indicate that the SR4000HT is suitable for improving the in-plane wafer uniformity of Al composition and thickness, which contribute to optical output and emission wavelength.
(Full pages PDF:537KB)

ALD Process Using Hydrogen Peroxide(H2O2mix)for High Aspect Ratio Structures

AFFORDABLE AND CLEAN ENERGY
INDUSTRY, INNOVATION AND INFRASTRUCTURE

As semiconductors become more sophisticated, the conformal deposition on High Aspect Ratio (HAR) structures is a challenge. This paper addresses the applicability of Al2O3 ALD with the H2O2/ H2O mixture vapor (H2O2 mix) on HAR structures. We have investigated the deposition conditions. As a result, the film was formed up to the aspect ratio equivalent 2000. The elucidation of the reaction mechanism suggests that the reaction between H2O2 and TMA is thermodynamically more likely to proceed, contributing to higher throughput by shortening the purge time. Compared to other oxidants, H2O2 mix can improve the deposition rate and film quality, and is expected to be applied to the manufacturing process of advanced semiconductors.
(Full pages PDF:673KB)

 

New Technologies & Systems

Simulation of Material Gas Supply System for Semiconductors Using Surrogate Model

INDUSTRY, INNOVATION AND INFRASTRUCTURE

It is important for a material gas supply system for semiconductors to maintain the gas-phase pressure in the container at a predetermined pressure to ensure a stable supply of the material gas by heating the cylinder with appropriate heater control. In designing such heaters, experimenting with all combinations of heater arrangements is not realistic due to the too large number of combinations and the limited cost and time involved for experiments. Therefore, we used 1D simulation to understand the rough behavior of the gas-phase pressure, and utilized it in the examination of the heater arrangement.
There was an issue in calculating the gas-phase pressure in the 1D simulation. However, we were able to establish a 1D simulation that matched the experimental results by estimating the gas-phase pressure using a surrogate model generated from the experimental result and incorporating the surrogate model into the 1D simulation.
(Full pages PDF:444KB)

Trace Moisture Monitor Used of Metal Organic Frameworks

GOOD HEALTH AND WELL-BEING
GOOD HEALTH AND WELL-BEING
GOOD HEALTH AND WELL-BEING

We provide high-purity gases used in semiconductor manufacturing and many other industries. If a high-purity gas is contaminated with moisture, deterioration of product performance and yield can be caused. Therefore, a monitoring technology that can immediately determine the quantity of the trace moisture concentration and provide feedback to the user is very important, and a trace moisture monitor with excellent detection sensitivity and response speed is required. Focusing on the gas adsorption function of metal organic frameworks (MOFs), we developed a trace moisture measurement system using MOFs as a moisture sensitive agent in collaboration with Kumamoto University, which has been researching sensing technology for trace moisture in gases, and established a trace moisture monitor based on this system.
This paper describes the basic principle of this moisture monitor and the improvements made to the size and performance of the trace moisture monitor reported in a previous paper.
(Full pages PDF:519KB)

Concentration and Accumulation of Nitrous Oxide in a Cascade Condenser-Reboiler

INDUSTRY, INNOVATION AND INFRASTRUCTURE
RESPONSIBLE CONSUMPTION AND PRODUCTION

In the main condenser, one of the components of a cryogenic air separation unit, N2O in the air blocks the evaporation passages and obstructs the liquid flow. Therefore, hydrocarbons may concentrate in the liquid oxygen. In order to establish a safe design and operation of cascade condenser-reboilers, we measured N2O behaviors in pilot-scale apparatus and implemented dynamic simulations of concentration and accumulation of N2O. As a result, it was observed that the concentration at which N2O accumulation starts is higher than that of down flow reboilers (DFRs). This result indicates it is possible to replace a large-capacity circulation pump, used to prevent N2O from accumulating in the evaporation passages but which generates a superfluous heat input, with a small-capacity pump. As a result, it is expected that the liquid product yield will be improved and that energy savings will be realized.
(Full pages PDF:579KB)

Carbon-13 Isotope Enrichment Process by CF4 Distillation

GOOD HEALTH AND WELL-BEING

We have developed a process to enrich the carbon stable isotope 13C used as a raw material for a diagnostic agent in the urea breath test, a non-invasive test for Helicobacter pylori, which causes stomach cancer, by distillation of the inert gas CF4. We calculated the separation factor of the CF4 isotope by a distillation test, constructed a two-component distillation calculation program of the CF4 isotopologue based on the test result, and completed the basic design of a very safe 13C enrichment process on a commercial equipment scale.
(Full pages PDF:322KB)

Development of Flow Synthesis Method for Deuterated Aromatic Compounds

QUALITY EDUCATION
AFFORDABLE AND CLEAN ENERGY

Organic Light Emitting Diode (OLED) device have excellent features such as self-luminescence, thinness, light weight, are widely used in various applications such as TVs and smartphone displays.
OLED materials have been founding improvement of the luminous efficiency and durability of devices by deuteration technology 1), we also have been continuing the development of deuteration technology for aromatic compounds targeting at OLED materials since 2007. In recent years, OLED panel manufacturers also applied deuterated OLED materials in their products and released them on the market. So that, the deuteration has tended to become common trend key technology to improve functions and durability more.
On the other hand, we have been facing with two issues for a long time. One is small production capacity, and the another is the cost of deuterated compounds.
In order to resolve two issue, needs to improve production throughput and enhance reaction efficiency. Then, we have developed new synthesis technology for deuterated aromatic compounds using a flow synthesis method. This paper reports the developed synthesis method.
(Full pages PDF:373KB)

Shaft Preheating System for Blast Furnace

DECENT WORK AND ECONOMIC GROWTH
INDUSTRY, INNOVATION AND INFRASTRUCTURE
INDUSTRY, INNOVATION AND INFRASTRUCTURE

In order to compensate for the lack of heat in the shaft section of a blast furnace, technology for preheating blast furnace gas and blowing it into the shaft section has been studied both in Japan and overseas. The developed shaft preheating system is suitable for this purpose, allowing the use of fuels with a wide range of heating values and hydrogen concentrations, and the adjustment of the temperature and flow rate of the high-temperature gas as desired. By using this system, the temperature of the shaft section can be adjusted according to the operating conditions of the blast furnace. By using this system, the temperature of the shaft section can be adjusted according to the operating conditions of the blast furnace. In the future, we will apply this system to innovative blast furnaces, such as oxygen blast furnaces, which require shaft preheating.
(Full pages PDF:407KB)

Metal-organic Chemical Vapor Deposition System for GaN Epi-wafer Mass Production “UR26KCCD”

DECENT WORK AND ECONOMIC GROWTH
INDUSTRY, INNOVATION AND INFRASTRUCTURE

TAIYO NIPPON SANSO Corporation (TNSC) has been developing the UR26K MOCVD platform since 2012 for the GaN epi-wafer mass production1). In addition, TNSC had developed a dry-cleaning system for removing the post epi-growth deposition on the MOCVD reactor’s interior components2) Here, a novel MOCVD system is introduced, the UR26KCCD (Fig. 1) for mass production that combines the benefits of the UR26K and component dry cleaning.
(Full pages PDF:210KB)
TAIYO NIPPON SANSO MOCVD Website