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Tech Voice
Technical Paper
Mar. 18, 2026
News
Website Relaunch Announcement
Dec. 06, 2025
Tech Voice
Hiroshi Amano – The World of LED
Sep. 24, 2025
News
Corporate Name Change Announcement
Jun. 24, 2025
Events
Taiyo Nippon Sanso is Proud to Sponsor the 15th International Conference on Nitride Semiconductors (ICNS-15) in Malmö, Sweden from July 6 (Sun) to 11 (Fri), 2025.
Oral Presentation
●Booth No.: 20
●Topic: Advanced High-Flow-Velocity Horizontal MOCVD Technology for Nitride Semiconductor Growth
May 20, 2025
News
Realization of Controlled n-Type Doping of β-Ga2O3 Homoepitaxial Layers via a Proprietary MOVPE
Key Technology for Mass-Production of Next-Generation Power Devices
Apr. 11, 2025
News
Lund University Selects Taiyo Nippon Sanso MOCVD Platform for Research and Development of Advanced Oxide Materials and Devices
Mar. 31, 2025
News
University of South Carolina Selects Taiyo Nippon Sanso MOCVD Platform for Research and Development of Advanced Nitride Materials and Devices
Mar. 31, 2025
Tech Voice
coming soon
Mar. 31, 2025
Tech Voice
coming soon
Oct. 11, 2024
News
Ohio State University Selects Taiyo Nippon Sanso MOCVD and HVPE Platforms for Research and Development of Advanced Nitride and Oxide Materials and Devices
Sep. 24, 2024
Events
Taiyo Nippon Sanso will be sponsoring (at Gold Level), exhibiting and holding presentations at the International Workshop on Nitride Semiconductors (IWN 2024), on the island of O'ahu, Hawai'i, USA from November 3 (Sun) to 8 (Fri), 2024.
Oral Presentation
●Booth No.: Not Fixed
●Topic-1: Demonstration of MOCVD System with Advanced Mass Production Performance
●Topic-2: Demonstration of AlScN Growth Using Commercial-Grade MOCVD Equipment Compatible with Low Vapor Pressure Precursor Supply
Jun. 20, 2024
News
Lit Thinking Selects Taiyo Nippon Sanso MOCVD Platform to Enable New UVLED Technologies and Commercial Products
Apr. 22, 2024
News
Innovation Unit, CSE Department will move from Shiba Office to Minatomirai Office. Business will resume on May 1.
Mar. 11, 2024
Events
Taiyo Nippon Sanso will be sponsoring (Platinum Level), exhibiting and holding presentations at the International Workshop on Gallium Oxide and Related Materials (IWGO), in Berlin, Germany from May 26 (Sun) to 31 (Fri), 2024.
Oral Presentation
●Booth No.: Not Fixed
●Topic: Growth of Si-doped β-Ga2O3 thick layers by low-pressure hot-wall MOVPE using tetramethylsilane as a doping gas
●Date & Time: Not fixed
Mar. 04, 2024
Events
Taiyo Nippon Sanso will be sponsoring, exhibiting and holding presentations at the 21st International Conference on Metal Organic Vapor Phase Epitaxy (ICMOVPE XXI), in Las Vegas, Nevada, USA from May 12 (Sun) to 17 (Fri), 2024.
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Mar. 18, 2026
News
Website Relaunch Announcement
Sep. 24, 2025
News
Corporate Name Change Announcement
May 20, 2025
News
Realization of Controlled n-Type Doping of β-Ga2O3 Homoepitaxial Layers via a Proprietary MOVPE
Key Technology for Mass-Production of Next-Generation Power Devices
Apr. 11, 2025
News
Lund University Selects Taiyo Nippon Sanso MOCVD Platform for Research and Development of Advanced Oxide Materials and Devices
Mar. 31, 2025
News
University of South Carolina Selects Taiyo Nippon Sanso MOCVD Platform for Research and Development of Advanced Nitride Materials and Devices
Oct. 11, 2024
News
Ohio State University Selects Taiyo Nippon Sanso MOCVD and HVPE Platforms for Research and Development of Advanced Nitride and Oxide Materials and Devices
Jun. 20, 2024
News
Lit Thinking Selects Taiyo Nippon Sanso MOCVD Platform to Enable New UVLED Technologies and Commercial Products
Apr. 22, 2024
News
Innovation Unit, CSE Department will move from Shiba Office to Minatomirai Office. Business will resume on May 1.
Jun. 30, 2023
News
Production Efficiency Improved by 2X Compared to Conventional Systems, Announcement of the Release of the UR26K-CCD for Mass Production GaN MOCVD Systems
Feb. 07, 2023
News
Taiyo Nippon Sanso sponsored, and also exhibited at, IWN 2022 in Berlin, Germany from October 9 (Sun) to 14 (Fri), 2022 and IWGO 2022 in Nagano prefecture from October 23 (Sun) to 27 (Thu). (English translation of TNSC house journal, January 2023)
Oct. 31, 2022
News
Taiyo Nippon Sanso conducted a presentation at the 41st Electronic Materials Symposium (EMS-41), held in Nara, Japan from October 19 (Wed) to 21 (Fri), 2022.
Topic: In-plane uniformity control of Al composition and thickness for AlGaN-based Far-UVC LEDs growth
Sep. 26, 2022
News
Taiyo Nippon Sanso is becoming a Gold Sponsor for the Harold M. Manasevit Young Investigator Award, which recognises seminal contributions in MOCVD technology and research.
Jun. 29, 2022
News
We have begun epitaxy using the newly-developed FR2000-OX Ga2O3 MOCVD system.
Apr. 20, 2022
News
Taiyo Nippon Sanso Ga2O3 MOCVD System Installed and Qualified for Operation at Tokyo University of Agriculture and Technology
Apr. 07, 2022
News
Taiyo Nippon Sanso and RIKEN demonstrate MOCVD AlGaN-based deep ultraviolet LED EL emission at 226nm
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Jun. 24, 2025
Events
Taiyo Nippon Sanso is Proud to Sponsor the 15th International Conference on Nitride Semiconductors (ICNS-15) in Malmö, Sweden from July 6 (Sun) to 11 (Fri), 2025.
Oral Presentation
●Booth No.: 20
●Topic: Advanced High-Flow-Velocity Horizontal MOCVD Technology for Nitride Semiconductor Growth
Sep. 24, 2024
Events
Taiyo Nippon Sanso will be sponsoring (at Gold Level), exhibiting and holding presentations at the International Workshop on Nitride Semiconductors (IWN 2024), on the island of O'ahu, Hawai'i, USA from November 3 (Sun) to 8 (Fri), 2024.
Oral Presentation
●Booth No.: Not Fixed
●Topic-1: Demonstration of MOCVD System with Advanced Mass Production Performance
●Topic-2: Demonstration of AlScN Growth Using Commercial-Grade MOCVD Equipment Compatible with Low Vapor Pressure Precursor Supply
Mar. 11, 2024
Events
Taiyo Nippon Sanso will be sponsoring (Platinum Level), exhibiting and holding presentations at the International Workshop on Gallium Oxide and Related Materials (IWGO), in Berlin, Germany from May 26 (Sun) to 31 (Fri), 2024.
Oral Presentation
●Booth No.: Not Fixed
●Topic: Growth of Si-doped β-Ga2O3 thick layers by low-pressure hot-wall MOVPE using tetramethylsilane as a doping gas
●Date & Time: Not fixed
Mar. 04, 2024
Events
Taiyo Nippon Sanso will be sponsoring, exhibiting and holding presentations at the 21st International Conference on Metal Organic Vapor Phase Epitaxy (ICMOVPE XXI), in Las Vegas, Nevada, USA from May 12 (Sun) to 17 (Fri), 2024.
Mar. 04, 2024
Events
Taiyo Nippon Sanso will be sponsoring the 7th U.S. Gallium Oxide Workshop (GOX 2024), to be held in Columbus, Ohio, USA from August 5 (Mon) to 7 (Wed), 2024.
Dec. 07, 2023
Events
Taiyo Nippon Sanso will be giving a presentation at the SPIE Photonics West, to be held in San Francisco, California, USA from January 27 (Sat) to February 1 (Thu), 2024.
Oral Presentation
●Topic: Crack-free growth of UVC LEDs on 6-inch sapphire substrates using face-to-face high-temperature annealed AlN by production scale MOCVD (Invited Paper)
●Date & Time: Feb. 1 (Thu) 11:30AM-12:00PM PST
Nov. 09, 2023
Events
Taiyo Nippon Sanso will be presenting a poster at and sponsoring the 14th International Conference on Nitride Semiconductors (ICNS-14), to be held in Fukuoka, Japan from November 12 (Sun) to 17 (Fri), 2023.
Poster Presentation
●Topic: Development of a MOCVD system with an integrated cleaning system and improved efficiency for the mass production of GaN epi-wafers
●Date & Time: Nov. 16 (Thu) 16:20-18:10 JST
Jul. 14, 2023
Events
Taiyo Nippon Sanso will be proud to be a bronze sponsor for the 6th U.S. Workshop on Gallium Oxide (GOX 2023), to be held in Buffalo, New York, USA from Aug 13 (Sun) to 16 (Wed), 2023.
Jun. 08, 2023
Events
Taiyo Nippon Sanso will be sponsoring the 23rd American Conference on Crystal Growth and Epitaxy (ACCGE-23) and the 21st US Workshop on Organometallic Vapor Phase Epitaxy (OMVPE-21), to be held in Tucson, Arizona, USA from Aug 13 (Sun) to 18 (Fri), 2023.
Apr. 17, 2023
Events
Taiyo Nippon Sanso will be sponsoring and conducting a presentation at the 6th International Workshop on Ultraviolet Materials and Devices (IWUMD 2023), to be held in Metz, France from June 5 (Mon) to 8 (Thu), 2023.
Feb. 16, 2023
Events
Taiyo Nippon Sanso will be sponsoring and conducting a presentation at the 15th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma2023), to be held in Gifu, Japan from March 5 (Sun) to 9 (Thu), 2023.
Oral Presentation
●Topic: Epitaxial growth for AlGaN-based deep-ultraviolet light-emitting diodes on 6-inch sputter-annealed AlN template by using a mass production MOCVD system
●Date & Time: Mar. 8 (Wed) 10:45-11:00 JST
Feb. 16, 2023
Events
Taiyo Nippon Sanso will be exhibiting at the International Conference on Compound Semiconductor Manufacturing Technology (2023 CS MANTECH), to be held in Orlando, USA from May 15 (Mon) to 18 (Thu), 2023.
Jan. 26, 2023
Events
Taiyo Nippon Sanso will be sponsoring the Ohio State Materials & Manufacturing Conference 2023, to be held in Ohio, USA from May 9 (Tue) to May 11 (Thu), 2023.
Sep. 01, 2022
Events
Taiyo Nippon Sanso will be sponsoring and exhibiting at the International Workshop on Gallium Oxide and Related Materials (IWGO2022) in Nagano, Japan from October 23 (Sun) to 27 (Thu), 2022.
Sep. 01, 2022
Events
Taiyo Nippon Sanso will be sponsoring and exhibiting at the International Workshop on Nitride Semiconductors (IWN2022) in Berlin, Germany from October 9 (Sun) to 14 (Fri), 2022.
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Dec. 06, 2025
Tech Voice
Hiroshi Amano – The World of LED
Mar. 31, 2025
Tech Voice
coming soon
Mar. 31, 2025
Tech Voice
coming soon
Aug. 23, 2015
Technical Paper
Correlation of the initial AlN layer and vertical direction current leakage of AlGaN/GaN high-electron-mobility transistors (HEMTs) on Si substances
Advance copy for the 11th Topical Workshop on Heterostructure Microelectronics (Poster Session)
Apr. 02, 2014
Technical Paper
Normally-OFF Al2O3/AlGaN/GaN MOS-HEMT on 8 in. Si with Low Leakage Current and High Breakdown Voltage (825 V) Appl. Phys. Express 7, 041003 (2014)
Mar. 20, 2014
Technical Paper
Industry MOCVD: III-N film growth Compound Semiconductor-Volume 20, Number 2-March 20
Oct. 23, 2013
Technical Paper
High growth rates of AlN and AlGaN on 8" silicon wafer using metal-organic vapor phase epitaxy reactor
May 20, 2013
Technical Paper
Control of Thickness and Composition Variation of AlGaN/GaN on 6- and 8-in. Substrates Using Multiwafer High-Growth-Rate Metal Organic Chemical Vapor Deposition Tool Jpn. J. Appl. Phys. 52 (2013) 08JB06
Jan. 21, 2013
Technical Paper
Uniform Growth of AlGaN/GaN High Electron Mobility Transistors on 200mm Silicon (111) Substrate Appl. Phys. Express 6 (2013) 026501
Oct. 23, 2012
Technical Paper
High-growth-rate AlGaN buffer layers and atmospheric-pressure growth of low-carbon GaN for AlGaN/GaN HEMT on the 6-in.-diameter Si substrate metal-organic vapor phase epitaxy system Journal of Crystal Growth
Oct. 14, 2012
Technical Paper
Control of Thickness and Composition Variation of AlGaN/GaN on 6" and 8" Substrates Using Multiwafer High-Growth-Rate MOCVD Tool Advance copy for IWN 2012 (International Workshop on Nitride Semiconductors)
Sep. 01, 2012
Technical Paper
MOCVD growth of AlN/GaN superlattice barrier with low sheet resistance Advance copy for the 59th Spring Meeting (2012) of the Japan Society of Applied Physics and Related Societies
Jun. 01, 2008
Technical Paper
High growth rate metal organic vapor phase epitaxy GaN "Journal of Crystal Growth 310(2008)3950-3952)"
Jan. 01, 2008
Technical Paper
Multiwafer atmospheric-pressure MOVPE reactor for nitride semiconductors and ex-situ dry cleaning of reactor components using chlorine gas for stable operation "Phys.Stat.Sol.(c)5,No.9,3017-3019(2008)"
Jan. 01, 2007
Technical Paper
Multi-wafer Atmospheric Pressure MOVPE Reactor for Nitride Semiconductors and ex-situ Dry Cleaning of Reactor Components by Chlorine Gas for Stable Operation Advance copy for the 34th International Symposium on Compound Semiconductors (ISCS2007)
Dec. 01, 2006
Technical Paper
Ex situ dry cleaning of reactor component of nitride metal organic chemical vapor deposition using chlorinated gases "Journal of Crystal Growth 298 (2007) 433-436"
Nov. 01, 2006
Technical Paper
GaN growth on 150-mm-diameter (111) Si substrates "Journal of Crystal Growth 298 (2007) 198-201"
Mar. 01, 2006
Technical Paper
Growth and electron transport studies of InAlN/GaN two-dimensional electron gas Advance copy for the 53rd Spring Meeting (2006) of the Japan Society of Applied Physics and Related Societies
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