CSR/Environment

Environmental and
Social Report 2009

Environmental and
Social Report 2007

Environmental and
Social Report 2005

Safe, Stable Supply of Semiconductor Material Gases

Supporting Safe, Stable Manufacturing of Electronic Products: Semiconductors are the core of a diverse variety of electronic products. The Taiyo Nippon Sanso Group supplies semiconductor-related gases to numerous electronics manufacturers. In this article we explain our activities at various sites where semiconductor material gases are manufactured, transported, supplied, and consumed, and clarify how we ensure a safe, stable supply of these gases that are essential in the manufacture of electronic products.

Thorough Attention to Safe Operation at Production Plants

Many semiconductor material gases including mono-silane, arsine, and phosphine have properties such as pyrophoricity or toxicity, which means that these gases must be handled with particular care. If an accident ever occurs, it will greatly affect not only staff at the site but the surrounding environment as well. The Taiyo Nippon Sanso Group is thus working hard to ensure safe operation at all four plants of Japan Fine Products Corporation, which manufactures gases for the Group, by automating some operations, combining remote monitoring and device control systems, and providing thorough training for safety management to personnel. The Group also conducts drills at these plants to ensure that personnel are able to respond promptly and effectively to emergencies such as fires and gas leaks.

Safety Training for Transport Personnel

Personnel who transport semiconductor material gases and other high-pressure gases are required to possess “Transport Surveillance” qualifications established by the High Pressure Gas Safety Law as well as to have completed courses for transport personnel conducted by the high-pressure gas safety organizations of prefectures around Japan. The Taiyo Nippon Nissan Group also conducts its own training sessions for transport personnel on the nature of semiconductor material gases and measures to be taken during emergencies. Individuals who have successfully completed the training are granted certificates and permission to transport these gases.

To further ensure safety during transport, the Group has developed its own vehicles specifically designed to carry specialty gases. These dedicated vehicles are equipped with such specialized functions as a “Gas Leak Detection and Warning System,” “Leaking Gas Countermeasure System,” “Mechanical Freezing System,” and a “Container Load Fall Prevention System.”

Providing Know-how for Safety Management in Various Forms

Approximately one fourth of all semiconductor and other high-pressure gas accidents occur at the usage site.
To ensure that customers use high-pressure gases safely, the Taiyo Nippon Sanso Group distributes a booklet it has prepared on the handling of gases and devices which includes a Material Safety Data Sheet (MSDS). The Group also conducts safety seminars at the customer’s premises when requested by the customer.
To provide know-how in safety management that the Group has accumulated over the years as a pioneer in industrial gases, we offer “TELEOS®,” a comprehensive safety monitoring service, in addition to safety equipment such as exhaust gas treatment devices and cylinder cabinets. This safety service combines unmanned monitoring of semiconductor fabrication facilities, an alert system in case of emergencies, automatic emergency gas cut-off, and automatic engagement of emergency response measures. More than 200 of these systems are already in operation.

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